Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094556 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2021-08-17 |
| 11075079 | Directional deposition for semiconductor fabrication | Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2021-07-27 |
| 10991583 | Self aligned litho etch process patterning method | Chih-Min HSIAO, Chien-Wen Lai, Yung-Sung Yen, Chih-Ming Lai, Ru-Gun Liu | 2021-04-27 |
| 10991657 | Method for fabricating semiconductor device | Chiu-Hsiang Chen, Yung-Sung Yen, Ru-Gun Liu | 2021-04-27 |
| 10962892 | Lithography process monitoring method | Chih-Jie Lee, Shih-Ming Chang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2021-03-30 |