Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158509 | Pattern fidelity enhancement with directional patterning technology | Chi-Cheng Hung, Chin-Hsiang Lin, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2021-10-26 |
| 11094556 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2021-08-17 |
| 11075079 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2021-07-27 |
| 11043381 | Directional patterning method | Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin +1 more | 2021-06-22 |