Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158509 | Pattern fidelity enhancement with directional patterning technology | Yu-Tien Shen, Chin-Hsiang Lin, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2021-10-26 |
| 11133395 | N-work function metal with crystal structure | Kuan-Ting Liu, Jun-Nan Nian | 2021-09-28 |
| 11043573 | Method of fabricating tantalum nitride barrier layer and semiconductor device thereof | Yu-Sheng Wang, Weng-Cheng Chen, Hao Wei, Ming-Ching CHUNG, Chi-Cherng Jeng | 2021-06-22 |
| 11031486 | Semiconductor device and methods of manufacture | Yu-Sheng Wang, Chia-Ching Lee, Ching-Hwanq Su | 2021-06-08 |
| 10985061 | Methods for forming contact plugs with reduced corrosion | Yu-Sheng Wang, Chen-Yuan Kao, Yi-Wei Chiu, Liang-Yueh Ou Yang, Yueh-Ching Pai | 2021-04-20 |