Issued Patents 2021
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211496 | FinFET device and method of forming | Xi-Zong Chen, Te-Chih Hsiung, Cha-Hsin Chao | 2021-12-28 |
| 11195750 | Etch profile control of interconnect structures | Allen Ke, Hung Jui Chang, Yu-Wei Kuo | 2021-12-07 |
| 11171003 | Doping through diffusion and epitaxy profile shaping | Chih-Teng Liao, Chih Hsuan Cheng, Li-Te Hsu | 2021-11-09 |
| 11120986 | Etching using chamber with top plate formed of non-oxygen containing material | En-Ping Lin, Tzu-Chan Weng, Wen-Zhong Ho | 2021-09-14 |
| 11088025 | Contact structure for semiconductor device | Yun-Yu Hsieh, Jeng Chang Her, Cha-Hsin Chao, Li-Te Hsu, Ying Ting Hsia | 2021-08-10 |
| 11075087 | Focus ring for plasma etcher | Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yu-Wei Kuo, Yu Lun Ke | 2021-07-27 |
| 11075279 | Metal gate and contact plug design and method forming same | Chih-Teng Liao, Xi-Zong Chen, Chia-Ching Tsai | 2021-07-27 |
| 11049756 | Thermal pad for etch rate uniformity | Chin-Huei Chiu, Tsung Fan Yin, Chen-Yi Liu, Hua-Li Hung, Xi-Zong Chen | 2021-06-29 |
| 11043373 | Interconnect system with improved low-k dielectrics | Joung-Wei Liou, Yu Lun Ke | 2021-06-22 |
| 11043251 | Magnetic tunnel junction device and method of forming same | Bo-Jhih Shen, Kuang-I Liu, Joung-Wei Liou, Jinn-Kwei Liang, Chin-Hsing Lin +4 more | 2021-06-22 |
| 11043427 | Method of manufacture of a FinFET device | Chia-Ching Tsai, Li-Te Hsu | 2021-06-22 |
| 11031252 | Heat shield for chamber door and devices manufactured using same | Meng-Je Chuang, Wan-Chun Kuan, Tzu-Chan Weng | 2021-06-08 |
| 11031279 | Semiconductor device with reduced trench loading effect | Chia-Kai Sun, Hung Jui Chang, Chia-Ching Tsai | 2021-06-08 |
| 11022878 | Critical dimension uniformity | Xi-Zong Chen, Cha-Hsin Chao, Li-Te Hsu, Chih-Hsuan Lin | 2021-06-01 |
| 11004730 | Methods of forming conductive features using a vacuum environment | Chia-Ching Tsai, Hung Jui Chang, Li-Te Hsu | 2021-05-11 |
| 10998259 | Semiconductor device and method of manufacture | Chia-Ching Tsai, Hung Jui Chang, Li-Te Hsu | 2021-05-04 |
| 10985053 | Contact plugs and methods of forming same | Xi-Zong Chen, Y. H. Kuo, Cha-Hsin Chao, Li-Te Hsu | 2021-04-20 |
| 10985061 | Methods for forming contact plugs with reduced corrosion | Yu-Sheng Wang, Chi-Cheng Hung, Chen-Yuan Kao, Liang-Yueh Ou Yang, Yueh-Ching Pai | 2021-04-20 |
| 10978341 | Contact openings and methods forming same | Chih-Hung Sun, Han-Ti Hsiaw, Kuan-Cheng Wang, Shin-Yeu Tsai, Jr-Yu Chen +1 more | 2021-04-13 |
| 10910223 | Doping through diffusion and epitaxy profile shaping | Chih-Teng Liao, Chih Hsuan Cheng, Li-Te Hsu | 2021-02-02 |