Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075087 | Focus ring for plasma etcher | Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo | 2021-07-27 |
| 11043373 | Interconnect system with improved low-k dielectrics | Joung-Wei Liou, Yi-Wei Chiu | 2021-06-22 |