Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120986 | Etching using chamber with top plate formed of non-oxygen containing material | Yi-Wei Chiu, Tzu-Chan Weng, Wen-Zhong Ho | 2021-09-14 |
EL
En-Ping Lin
Overall (2021): #464,242 of 548,734Top 85%
1
Patents 2021