Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120986 | Etching using chamber with top plate formed of non-oxygen containing material | En-Ping Lin, Yi-Wei Chiu, Wen-Zhong Ho | 2021-09-14 |
| 11031252 | Heat shield for chamber door and devices manufactured using same | Meng-Je Chuang, Wan-Chun Kuan, Yi-Wei Chiu | 2021-06-08 |