Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120986 | Etching using chamber with top plate formed of non-oxygen containing material | En-Ping Lin, Yi-Wei Chiu, Tzu-Chan Weng | 2021-09-14 |
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Wen-Zhong Ho
Overall (2021): #215,817 of 548,734Top 40%
1
Patents 2021