Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049756 | Thermal pad for etch rate uniformity | Chin-Huei Chiu, Tsung Fan Yin, Hua-Li Hung, Xi-Zong Chen, Yi-Wei Chiu | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049756 | Thermal pad for etch rate uniformity | Chin-Huei Chiu, Tsung Fan Yin, Hua-Li Hung, Xi-Zong Chen, Yi-Wei Chiu | 2021-06-29 |