Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11157997 | Systems and methods for analyzing data | Chuck Robida | 2021-10-26 |
| 11158509 | Pattern fidelity enhancement with directional patterning technology | Yu-Tien Shen, Chi-Cheng Hung, Chin-Hsiang Lin, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2021-10-26 |
| 11106138 | Lithography process and material for negative tone development | Wei-Han Lai, Ching-Yu Chang | 2021-08-31 |
| 11062905 | Patterning process of a semiconductor structure with a middle layer | Chien-Chih Chen | 2021-07-13 |
| 11003076 | Extreme ultraviolet photoresist and method | Yen-Hao Chen, Wei-Han Lai, Chin-Hsiang Lin | 2021-05-11 |