Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143963 | Negative tone developer for extreme ultraviolet lithography | Chen-Yu Liu, Tzu-Yang Lin, Ming-Hui Weng, Ching-Yu Chang, Chin-Hsiang Lin | 2021-10-12 |
| 11106138 | Lithography process and material for negative tone development | Chien-Wei Wang, Ching-Yu Chang | 2021-08-31 |
| 11073763 | Photoresist and method | Ching-Yu Chang, Chen-Hau Wu | 2021-07-27 |
| 11003076 | Extreme ultraviolet photoresist and method | Yen-Hao Chen, Chien-Wei Wang, Chin-Hsiang Lin | 2021-05-11 |