Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143963 | Negative tone developer for extreme ultraviolet lithography | Chen-Yu Liu, Wei-Han Lai, Tzu-Yang Lin, Ching-Yu Chang, Chin-Hsiang Lin | 2021-10-12 |
| 11079681 | Lithography method for positive tone development | Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2021-08-03 |
| 11022886 | Bottom-up material formation for planarization | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2021-06-01 |
| 11009796 | Method for forming semiconductor structure | An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu | 2021-05-18 |