Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137685 | Semiconductor method of protecting wafer from bevel contamination | Joy Cheng, Ching-Yu Chang, Chin-Hsiang Lin | 2021-10-05 |
| 11054742 | EUV metallic resist performance enhancement via additives | Joy Cheng, Ching-Yu Chang | 2021-07-06 |
| 11036137 | Method for forming semiconductor structure | Ching-Yu Chang, Chin-Hsiang Lin | 2021-06-15 |
| 11029602 | Photoresist composition and method of forming photoresist pattern | Chin-Hsiang Lin, Ching-Yu Chang, Yahru Cheng | 2021-06-08 |
| 11016386 | Photoresist composition and method of forming photoresist pattern | Chin-Hsiang Lin, Ching-Yu Chang | 2021-05-25 |
| 11009796 | Method for forming semiconductor structure | Ming-Hui Weng, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu | 2021-05-18 |
| 10990013 | Method for forming semiconductor structure | Ching-Yu Chang, Chin-Hsiang Lin | 2021-04-27 |