Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137685 | Semiconductor method of protecting wafer from bevel contamination | An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin | 2021-10-05 |
| 11054742 | EUV metallic resist performance enhancement via additives | An-Ren Zi, Ching-Yu Chang | 2021-07-06 |