Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043573 | Method of fabricating tantalum nitride barrier layer and semiconductor device thereof | Chi-Cheng Hung, Yu-Sheng Wang, Weng-Cheng Chen, Hao Wei, Chi-Cherng Jeng | 2021-06-22 |