Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211256 | Method with CMP for metal ion prevention | Shih-Kang Fu, Shau-Lin Shue | 2021-12-28 |
| 11205618 | Graphene barrier layer | Shin-Yi Yang, Shau-Lin Shue | 2021-12-21 |
| 11201106 | Semiconductor device with conductors embedded in a substrate | Hsin-Ping Chen, Shau-Lin Shue | 2021-12-14 |
| 11152255 | Methods of performing chemical-mechanical polishing process in semiconductor devices | Shih-Kang Fu, Shau-Lin Shue | 2021-10-19 |
| 11127680 | Semiconductor device and manufacturing method thereof | Shih-Kang Fu, Hsien-Chang Wu, Li-Lin Su, Shau-Lin Shue | 2021-09-21 |
| 11114374 | Graphene enabled selective barrier layer formation | Shin-Yi Yang, Guanyu Luo, Chin-Lung Chung, Shau-Lin Shue | 2021-09-07 |
| 11094631 | Graphene layer for reduced contact resistance | Shin-Yi Yang, Shau-Lin Shue | 2021-08-17 |
| 11094626 | Methods of forming interconnect structures in semiconductor fabrication | Shau-Lin Shue | 2021-08-17 |
| 11081447 | Graphene-assisted low-resistance interconnect structures and methods of formation thereof | Shin-Yi Yang, Yu-Chen Chan, Hai-Ching Chen, Shau-Lin Shue | 2021-08-03 |
| 11011467 | Method of forming interconnection structure | Yu-Chen Chan, Shin-Yi Yang | 2021-05-18 |
| 10964636 | Interconnect structure with low resistivity and method for forming the same | Shin-Yi Yang | 2021-03-30 |