Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069526 | Using a self-assembly layer to facilitate selective formation of an etching stop layer | Shao-Kuan Lee, Hsin-Yen Huang, Cheng-Chin Lee, Hai-Ching Chen, Shau-Lin Shue | 2021-07-20 |
| 11011421 | Semiconductor device having voids and method of forming same | Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue | 2021-05-18 |
| 10916443 | Spacer-damage-free etching | Tsung-Min Huang, Chung-Ju Lee | 2021-02-09 |