Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2020-06-23 |
| 10663392 | Variable aperture mask | Barry Blasenheim, Michael Friedmann, Pablo I. Rovira | 2020-05-26 |
| 10648796 | Optical metrology with small illumination spot size | Kevin Peterlinz, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2020-05-12 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2020-04-07 |
| 10588507 | Optical method to assess the refractive properties of an optical system | Georgios Skolianos, Ying Xu, John Serri | 2020-03-17 |
| 10591406 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Paykin Irina, Alexander Svizher +4 more | 2020-03-17 |