Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2020-05-12 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |