Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kevin Peterlinz | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Alexander Buettner, Andrei V. Shchegrov | 2020-05-12 |