Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, David Y. Wang, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2020-06-23 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |
| 10612980 | Temperature sensing based flow monitoring and fault detection | Janusz Jurski, Tozer J. Bandorawalla, Ramkumar Nagappan, Mariusz Oriol, Piotr Sawicki +1 more | 2020-04-07 |
| 10605722 | Metrology system calibration refinement | Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Leonid Poslavsky +1 more | 2020-03-31 |
| 10551166 | Optical measurement of a highly absorbing film layer over highly reflective film stacks | Carlos L. Ygartua | 2020-02-04 |