Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Stilian Ivanov Pandev, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim | 2020-10-13 |
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Kerstin Purrucker, Kevin Peterlinz | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Kerstin Purrucker, Andrei V. Shchegrov | 2020-05-12 |