Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Alexander Buettner, Stilian Ivanov Pandev, Emanuel Saerchen, Andrei V. Shchegrov | 2020-10-13 |
| 10739571 | Lens design for spectroscopic ellipsometer or reflectometer | — | 2020-08-11 |
| 10663392 | Variable aperture mask | Noam Sapiens, Michael Friedmann, Pablo I. Rovira | 2020-05-26 |