Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Alexander Buettner, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim | 2020-10-13 |
| 10769320 | Integrated use of model-based metrology and a process model | Alexander Kuznetsov, Andrei V. Shchegrov | 2020-09-08 |
| 10732516 | Process robust overlay metrology based on optical scatterometry | Andrei V. Shchegrov, Wei Lu | 2020-08-04 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2020-04-07 |
| 10580673 | Semiconductor metrology and defect classification using electron microscopy | Alexander Kuznetsov | 2020-03-03 |