Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Nikolay Artemiev, Antonio Arion Gellineau, Alexander N. Bykanov | 2020-10-27 |
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov +1 more | 2020-10-13 |
| 10769320 | Integrated use of model-based metrology and a process model | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2020-09-08 |
| 10712145 | Hybrid metrology for patterned wafer characterization | Boxue Chen, Andrei Veldman, Andrei V. Shchegrov | 2020-07-14 |
| 10580673 | Semiconductor metrology and defect classification using electron microscopy | Stilian Ivanov Pandev | 2020-03-03 |