Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859518 | X-ray zoom lens for small angle x-ray scatterometry | Michael Friedmann | 2020-12-08 |
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Antonio Arion Gellineau, Alexander N. Bykanov, Alexander Kuznetsov | 2020-10-27 |