Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Nikolay Artemiev, Alexander N. Bykanov, Alexander Kuznetsov | 2020-10-27 |
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Yin Xu, Kaiwen Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10767978 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Sergey Zalubovsky | 2020-09-08 |
| 10727142 | Process monitoring of deep structures with X-ray scatterometry | Thaddeus Gerard Dziura | 2020-07-28 |