Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10677586 | Phase revealing optical and X-ray semiconductor metrology | Andrei Veldman | 2020-06-09 |
| 10545104 | Computationally efficient X-ray based overlay measurement | Andrei V. Shchegrov, Michael S. Bakeman | 2020-01-28 |