Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman | 2020-09-15 |
| 10767978 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Antonio Arion Gellineau | 2020-09-08 |
| 10748736 | Liquid metal rotating anode X-ray source for semiconductor metrology | — | 2020-08-18 |
| 10580610 | Cold cathode switching device and converter | Timothy John Sommerer, Joseph Darryl Michael, David J. Smith | 2020-03-03 |