Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Antonio Arion Gellineau, Yin Xu, Kaiwen Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10727142 | Process monitoring of deep structures with X-ray scatterometry | Antonio Arion Gellineau | 2020-07-28 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |