Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801975 | Metrology tool with combined X-ray and optical scatterometers | Andrei V. Shchegrov | 2020-10-13 |
| 10545104 | Computationally efficient X-ray based overlay measurement | John J. Hench, Andrei V. Shchegrov | 2020-01-28 |