BC

Boxue Chen

KL Kla-Tencor: 1 patents #130 of 345Top 40%
Overall (2020): #532,426 of 565,922Top 95%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10712145 Hybrid metrology for patterned wafer characterization Andrei Veldman, Alexander Kuznetsov, Andrei V. Shchegrov 2020-07-14