Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732516 | Process robust overlay metrology based on optical scatterometry | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2020-08-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732516 | Process robust overlay metrology based on optical scatterometry | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2020-08-04 |