Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761022 | Rotated boundaries of stops and targets | Tzahi Grunzweig | 2020-09-01 |
| 10699969 | Quick adjustment of metrology measurement parameters according to process variation | Einat Peled, Eran Amit, Yuval Lamhot, Noga Sella, Wei-Te Cheng | 2020-06-30 |
| 10591406 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina +4 more | 2020-03-17 |
| 10527952 | Fault discrimination and calibration of scatterometry overlay targets | Tzahi Grunzweig, Jordan Pio | 2020-01-07 |