Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761022 | Rotated boundaries of stops and targets | Alexander Svizher | 2020-09-01 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Nadav Gutman, David Gready, Mark Ghinovker, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |
| 10527952 | Fault discrimination and calibration of scatterometry overlay targets | Jordan Pio, Alexander Svizher | 2020-01-07 |