Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10726169 | Target and process sensitivity analysis to requirements | Michael Adel, Nuriel Amir, Tal Shusterman, David Gready, Sergey Borodyansky | 2020-07-28 |
| 10705434 | Verification metrology target and their design | Michael Adel, Inna Tarshish-Shapir, Jeremy (Shi-Ming) Wei | 2020-07-07 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, Nadav Gutman, David Gready, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |
| 10527951 | Compound imaging metrology targets | Raviv Yohanan, Eran Amit, Tal Itzkovich, Nuriel Amir | 2020-01-07 |