Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831108 | Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology | Tal Marciano, Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld +17 more | 2020-11-10 |
| 10726169 | Target and process sensitivity analysis to requirements | Michael Adel, Mark Ghinovker, Tal Shusterman, David Gready, Sergey Borodyansky | 2020-07-28 |
| 10698321 | Process compatible segmented targets and design methods | — | 2020-06-30 |
| 10551749 | Metrology targets with supplementary structures in an intermediate layer | Vladimir Levinski, Amnon Manassen, Eran Amit, Liran Yerushalmi, Amit Shaked | 2020-02-04 |
| 10527951 | Compound imaging metrology targets | Raviv Yohanan, Eran Amit, Mark Ghinovker, Tal Itzkovich | 2020-01-07 |