Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866090 | Estimating amplitude and phase asymmetry in imaging technology for achieving high accuracy in overlay metrology | Nadav Gutman, Yuri Paskover, Guy M. Cohen, Vladimir Levinski | 2020-12-15 |
| 10831108 | Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology | Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld, Zeng Zhao +17 more | 2020-11-10 |
| 10761034 | Expediting spectral measurement in semiconductor device fabrication | Vincent Immer, Etay Lavert | 2020-09-01 |