Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866090 | Estimating amplitude and phase asymmetry in imaging technology for achieving high accuracy in overlay metrology | Tal Marciano, Yuri Paskover, Guy M. Cohen, Vladimir Levinski | 2020-12-15 |
| 10768533 | Method and system for generating programmed defects for use in metrology measurements | Hong Xiao | 2020-09-08 |
| 10684563 | On the fly target acquisition | Amnon Manassen, Andrew V. Hill, Yossi Simon, Alexander Novikov, Eugene Maslovsky | 2020-06-16 |
| 10622238 | Overlay measurement using phase and amplitude modeling | Moran Zaberchik, Eran Amit | 2020-04-14 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, David Gready, Mark Ghinovker, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |
| 10533848 | Metrology and control of overlay and edge placement errors | Andrei V. Shchegrov, Frank Laske | 2020-01-14 |