Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763146 | Recipe optimization based zonal analysis | Roie Volkovich, Michael Adel, Liran Yerushalmi, Eitan Herzel, Mengmeng Ye | 2020-09-01 |
| 10699969 | Quick adjustment of metrology measurement parameters according to process variation | Einat Peled, Alexander Svizher, Yuval Lamhot, Noga Sella, Wei-Te Cheng | 2020-06-30 |
| 10685165 | Metrology using overlay and yield critical patterns | Daniel Kandel, Mark D. Smith, Mark Wagner, Myungjun Lee | 2020-06-16 |
| 10622238 | Overlay measurement using phase and amplitude modeling | Nadav Gutman, Moran Zaberchik | 2020-04-14 |
| 10571811 | Device metrology targets and methods | Daniel Kandel, Dror Alumot, Amit Shaked, Liran Yerushalmi | 2020-02-25 |
| 10551749 | Metrology targets with supplementary structures in an intermediate layer | Vladimir Levinski, Amnon Manassen, Nuriel Amir, Liran Yerushalmi, Amit Shaked | 2020-02-04 |
| 10527951 | Compound imaging metrology targets | Raviv Yohanan, Mark Ghinovker, Tal Itzkovich, Nuriel Amir | 2020-01-07 |