MS

Mark D. Smith

KL Kla-Tencor: 2 patents #58 of 345Top 20%
Overall (2020): #142,960 of 565,922Top 30%
2
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10685165 Metrology using overlay and yield critical patterns Daniel Kandel, Mark Wagner, Eran Amit, Myungjun Lee 2020-06-16
10579768 Process compatibility improvement by fill factor modulation Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael Adel +5 more 2020-03-03