Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837919 | Single cell scatterometry overlay targets | — | 2020-11-17 |
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Tal Itzkovich, Sharon Aharon, Michael Adel, Yuri Paskover +5 more | 2020-03-03 |