Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10817999 | Image-based overlay metrology and monitoring using through-focus imaging | Nimrod Shuall, Claire E. Staniunas | 2020-10-27 |
| 10726169 | Target and process sensitivity analysis to requirements | Michael Adel, Nuriel Amir, Mark Ghinovker, Tal Shusterman, Sergey Borodyansky | 2020-07-28 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, Nadav Gutman, Mark Ghinovker, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |