Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10825708 | Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Imad Yousif, Albert Wang, Gary Leray | 2020-11-03 |
| 10705514 | Adaptive chamber matching in advanced semiconductor process control | — | 2020-07-07 |
| 10657214 | Predictive spatial digital design of experiment for advanced semiconductor process optimization and control | Dermot Cantwell, Waheb Bishara | 2020-05-19 |
| 10573493 | Inductively coupled plasma apparatus | Valentin N. Todorow, Ankur Agarwal, Zhigang Chen, TSE-CHIANG WANG, Andrew Nguyen +2 more | 2020-02-25 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Tza-Jing Gung, Vladimir Knyazik, Kyle Tantiwong, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |