Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825708 | Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Samer Banna, Imad Yousif, Albert Wang | 2020-11-03 |
| 10553400 | Methods and apparatus for frequency generator and match network communication | — | 2020-02-04 |