Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866526 | Metrology method and device | Yevgeniy Konstantinovich Shmarev, Nitesh Pandey | 2020-12-15 |
| 10852247 | Variable corrector of a wave front | Stanislav Smirnov, Johannes Matheus Marie De Wit, Teunis Willem Tukker | 2020-12-01 |
| 10816909 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2020-10-27 |
| 10788757 | Metrology method and apparatus, computer program and lithographic system | Su-Ting CHENG, Sergei Sokolov | 2020-09-29 |
| 10678145 | Radiation receiving system | Alessandro Polo, Nitesh Pandey | 2020-06-09 |
| 10599048 | Metrology apparatus, method of measuring a structure, device manufacturing method | Sergey Tarabrin | 2020-03-24 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Zili Zhou, Sebastianus Adrianus GOORDEN, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |
| 10598483 | Metrology method, apparatus and computer program | Sergey Tarabrin, Simon Philip Spencer Hastings | 2020-03-24 |
| 10551308 | Focus control arrangement and method | Martin Jacobus Johan Jak, Gerbrand Van Der Zouw, Dirk Broddin | 2020-02-04 |