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Processing tool with electrically switched electrode assembly |
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Zone-controlled rare-earth oxide ALD and CVD coatings |
Xiaowei Wu, Jennifer Y. Sun |
2019-10-15 |
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Flourination process to create sacrificial oxy-flouride layer |
Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun |
2019-10-15 |
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Distributed electrode array for plasma processing |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman |
2019-09-17 |
| 10409295 |
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) |
Ming Xu, Sushant S. Koshti, Steven E. Babayan, Jennifer Y. Sun |
2019-09-10 |
| 10395964 |
Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck |
Matthew J. Busche, Vijay D. Parkhe |
2019-08-27 |
| 10388547 |
Side storage pods, equipment front end modules, and methods for processing substrates |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine |
2019-08-20 |
| 10373807 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman |
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| 10359743 |
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
Dean C. Hruzek |
2019-07-23 |
| 10312056 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman |
2019-06-04 |
| 10217650 |
Methods and apparatus for substrate edge cleaning |
James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more |
2019-02-26 |
