Issued Patents 2017
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818621 | Cyclic oxide spacer etch process | Aurelien Tavernier, Qingjun Zhou, Tom Choi, YungChen Lin, Olivier Joubert | 2017-11-14 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2017-11-07 |
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, James D. Carducci +2 more | 2017-10-24 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2017-10-24 |
| 9728623 | Replacement metal gate transistor | Steven R. Sherman | 2017-08-08 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman | 2017-08-08 |
| 9721807 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Tom Choi, Sean S. Kang, Jeremiah T. Pender +1 more | 2017-08-01 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2017-07-18 |
| 9708713 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2017-07-18 |
| 9660054 | Tunneling field effect transistor (TFET) with ultra shallow pockets formed by asymmetric ion implantation and method of making same | — | 2017-05-23 |
| 9643179 | Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors | Sebastian U. Engelmann, Stephen M. Rossnagel | 2017-05-09 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2017-02-28 |
| 9564297 | Electron beam plasma source with remote radical source | Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Hamid Tavassoli +2 more | 2017-02-07 |
| 9553147 | Trench formation with CD less than 10nm for replacement fin growth | Hua Chung | 2017-01-24 |
| 9548201 | Self-aligned multiple spacer patterning schemes for advanced nanometer technology | Uday Mitra, Praburam Gopalraja, Srinivas D. Nemani, Hua Chung | 2017-01-17 |