Issued Patents 2016
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502288 | Method of forming an interconnect structure | Son V. Nguyen, Thomas J. Haigh, Jr., Hosadurga Shobha, Tuan A. Vo | 2016-11-22 |
| 9484403 | Boron rich nitride cap for total ionizing dose mitigation in SOI devices | Deborah A. Neumayer, Kenneth P. Rodbell | 2016-11-01 |
| 9472503 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2016-10-18 |
| 9472450 | Graphene cap for copper interconnect structures | Griselda Bonilla, Christos D. Dimitrakopoulos, James B. Hannon, Qinghuang Lin, Deborah A. Neumayer +3 more | 2016-10-18 |
| 9449812 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2016-09-20 |
| 9435031 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Son V. Nguyen, Deepika Priyadarshini | 2016-09-06 |
| 9431520 | Graphene nanoribbons and carbon nanotubes fabricated from SiC fins or nanowire templates | Guy M. Cohen, Christos D. Dimitrakopoulos | 2016-08-30 |
| 9397195 | Graphene nanoribbons and carbon nanotubes fabricated from SiC fins or nanowire templates | Guy M. Cohen, Christos D. Dimitrakopoulos | 2016-07-19 |
| 9337026 | Graphene growth on a carbon-containing semiconductor layer | Jack O. Chu, Christos D. Dimitrakopoulos, Chun-Yung Sung | 2016-05-10 |
| 9312224 | Interconnect structure containing a porous low k interconnect dielectric/dielectric cap | Donald F. Canaperi, Thomas J. Haigh, Jr., Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +2 more | 2016-04-12 |
| 9293557 | Low temperature spacer for advanced semiconductor devices | Kevin K. Chan, Deborah A. Neumayer, Dae-Gyu Park, Norma E. Sosa, Min Yang | 2016-03-22 |
| 9275952 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2016-03-01 |
| 9236250 | Formation of a graphene layer on a large substrate | Jack O. Chu, Christos D. Dimitrakopoulos, Marcus O. Freitag, Timothy J. McArdle, Robert L. Wisnieff | 2016-01-12 |
| 9231063 | Boron rich nitride cap for total ionizing dose mitigation in SOI devices | Deborah A. Neumayer, Kenneth P. Rodbell | 2016-01-05 |