Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472503 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2016-10-18 |
| 9466538 | Method to achieve ultra-high chip-to-chip alignment accuracy for wafer-to-wafer bonding process | Spyridon Skordas, Subramanian S. Iyer, Shidong Li, Wei Lin | 2016-10-11 |
| 9449810 | Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors | Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha | 2016-09-20 |
| 9449812 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2016-09-20 |
| 9312224 | Interconnect structure containing a porous low k interconnect dielectric/dielectric cap | Alfred Grill, Thomas J. Haigh, Jr., Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +2 more | 2016-04-12 |
| 9275952 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2016-03-01 |
| 9275874 | Methods for fabricating integrated circuits using chemical mechanical planarization to recess metal | Kunaljeet Tanwar, Xunyuan Zhang, Raghuveer R. Patlolla | 2016-03-01 |